An overview of MgTiO3 thin films: Deposition Techniques and Properties

Abstract

The purpose of this work is to present an overview of different methods used for fabrication of MgTiO3 thin films and the influence of deposition methods on the properties of the films. The nature and quality of the film change with deposition method, resulting in a variation in the internal properties of the film. Some of the popular deposition techniques used to fabricate MgTiO3 films are described in this report. The structural, optical and electrical properties of MgTiO3 thin films obtained by various research groups are reported here along with the characterization techniques. The information about the substrate used to deposit MgTiO3 films are stated. Furthermore, the effect of different doping in A and B site of MgTiO3 films as well as their applications in different fields are reported.